- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/509 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
Patent holdings for IPC class C23C 16/509
Total number of patents in this class: 690
10-year publication summary
|
51
|
42
|
49
|
69
|
47
|
38
|
59
|
42
|
58
|
12
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 16587 |
117 |
| Tokyo Electron Limited | 11599 |
87 |
| Lam Research Corporation | 4775 |
86 |
| ASM IP Holding B.V. | 1715 |
25 |
| Jusung Engineering Co., Ltd. | 359 |
18 |
| Novellus Systems, Inc. | 559 |
17 |
| Nissin Electric Co., Ltd. | 213 |
17 |
| Kokusai Electric Corporation | 1791 |
16 |
| Sharp Kabushiki Kaisha | 18957 |
12 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
8 |
| Konica Minolta, Inc. | 8349 |
8 |
| Samsung Display Co., Ltd. | 30585 |
6 |
| Tohoku University | 2526 |
6 |
| ULVAC, Inc. | 1448 |
6 |
| Centrotherm International AG | 60 |
6 |
| Jiangsu Favored Nanotechnology Co., LTD | 145 |
6 |
| Sumitomo Electric Industries, Ltd. | 14131 |
5 |
| Sumitomo Chemical Company, Limited | 8808 |
5 |
| Konica Minolta Holdings, Inc. | 1086 |
5 |
| EMD Corporation | 26 |
5 |
| Other owners | 229 |